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- Ultra-Clean Technology Handbook (Volume 1: Ultra-Pure Water)
Ultra-Clean Technology Handbook (Volume 1: Ultra-Pure Water)
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$89.99
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Product Details
Author:
Tadahiro Ohmi
Format:
Paperback
Pages:
944
Publisher:
CRC Press (June 30, 2020)
Language:
English
ISBN-13:
9780367402341
Weight:
61.75oz
Dimensions:
6.875" x 9.6875"
File:
TAYLORFRANCIS-TayFran_260412045150457-20260412.xml
Folder:
TAYLORFRANCIS
List Price:
$89.99
As low as:
$85.49
Publisher Identifier:
P-CRC
Discount Code:
H
Audience:
Professional and scholarly
Country of Origin:
United States
Pub Discount:
30
Case Pack:
1
Imprint:
CRC Press
Overview
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.
