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Plasma Electronics (Applications in Microelectronic Device Fabrication)

List Price: $310.00
SKU:
9781482222050
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  • Product Details

    Author:
    Toshiaki Makabe, Zoran Lj. Petrović
    Format:
    Hardcover
    Pages:
    412
    Publisher:
    CRC Press (August 27, 2014)
    Imprint:
    CRC Press
    Language:
    English
    ISBN-13:
    9781482222050
    Weight:
    25.625oz
    Dimensions:
    6.125" x 9.1875"
    File:
    TAYLORFRANCIS-TayFran_261002043444689-20261002.xml
    Folder:
    TAYLORFRANCIS
    List Price:
    $310.00
    Country of Origin:
    United States
    Pub Discount:
    30
    Case Pack:
    14
    As low as:
    $294.50
    Publisher Identifier:
    P-CRC
    Discount Code:
    H
  • Overview

    Emphasizing computational algorithms and techniques, this updated edition of a popular monograph provides a complete picture of plasma physics, computational methods, cutting-edge applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. This edition reflects recent progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process.