Physics of Radiofrequency Capacitive Discharge
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Product Details
Author:
V. P. Savinov
Format:
Paperback
Pages:
342
Publisher:
CRC Press (June 30, 2020)
Language:
English
ISBN-13:
9780367571627
Weight:
16oz
Dimensions:
6.125" x 9.1875"
File:
TAYLORFRANCIS-TayFran_260513043821732-20260513.xml
Folder:
TAYLORFRANCIS
List Price:
$67.99
Case Pack:
1
As low as:
$64.59
Publisher Identifier:
P-CRC
Discount Code:
H
Country of Origin:
United States
Pub Discount:
30
Imprint:
CRC Press
Overview
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.
