Micro Electro Mechanical System Design

Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical system (MEMS) design procedures. The author focuses on the complete process required for designing and developing MEMS. Instead of focusing only on the detailed engineering and physics underlying a MEMS device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS design engineer must consider in order to make informed technical decisions. The chapters answer important questions such as what fabrication processes to use, which design approach will produce a reliable device with good yield, and what packaging and assembly requirements are needed.