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MEMS (Design and Fabrication)
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Product Details
Author:
Mohamed Gad-el-Hak
Format:
Paperback
Pages:
664
Publisher:
CRC Press (December 18, 2019)
Language:
English
Audience:
Professional and scholarly
ISBN-13:
9780367391638
Weight:
16oz
Dimensions:
7" x 10"
File:
TAYLORFRANCIS-TayFran_260714044130059-20260714.xml
Folder:
TAYLORFRANCIS
List Price:
$98.99
Country of Origin:
United States
Case Pack:
1
As low as:
$94.04
Publisher Identifier:
P-CRC
Discount Code:
H
Pub Discount:
30
Imprint:
CRC Press
Overview
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
